Nitrogen trifluoride

  • Nitrogen fluoride
  • Trifluoramine
  • Trifluorammonia
Formula NF3
Structure
Description A colorless gas with a moldy odor.
Uses In high-power chemical lasers, plasma etching of semiconductor materials, production of perfluoroammonium salts, a proposed gas filler to increase the life and brightness of lamps, oxidizing agent in rocketry (not yet commercialized, 1988).

Registry Numbers and Inventories.
CAS 7783-54-2
EC (EINECS/ELINCS) 232-007-1
RTECS QX1925000
RTECS class Other
UN (DOT) 2451
Merck 12,6701
Beilstein/Gmelin 1551 (G)
Canada DSL/NDSL DSL
US TSCA Listed
Japan ENCS (MITI) Listed
Korea ECL Listed

Properties.
Formula F3N
Formula mass 71.00
Melting point, °C -207.15
Boiling point, °C -129.1
Vapor pressure, mmHg 0.15 (-193.3 C)
Vapor density (air=1) 2.46
Critical temperature -39
Critical pressure 44.7
Density 1.885 g/cm3 (-129 C)
Solubility in water Slightly soluble
Heat of vaporization 11.59 kj/mol

Hazards and Protection.
Storage Keep in a cool, dry, dark location in a tightly sealed container or cylinder. Keep away from incompatible materials, ignition sources and untrained individuals. Secure and label area. Protect containers/cylinders from physical damage.
Handling All chemicals should be considered hazardous. Avoid direct physical contact. Use appropriate, approved safety equipment. Untrained individuals should not handle this chemical or its container. Handling should occur in a chemical fume hood.
Protection Wear appropriate protective gloves, clothing and goggles. Always wear thermal protective clothing when handling refrigerated/cryogenic liquids.
Respirators Wear positive pressure self-contained breathing apparatus (SCBA).
Small spills/leaks Attempt to stop leak if without undue personnel hazard.
Stability No data.
Incompatibilities Can react violently with hydrogen, ammonia, carbon monoxide, diborane, hydrogen sulfide, methane, tetrafluorohydrazine, charcoal.
Decomposition On decomposition, it emits highly toxic fumes of hydrogen fluoride.

Fire.
Fire fighting Extinguish fire using agent suitable for type of surrounding fire. (Material itself does not burn or burns with difficulty.) Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible.
Fire potential Substance does not burn but will support combustion.
Hazards Some may react explosively with fuels. May ignite combustibles (wood, paper, oil, clothing, etc.). Vapors from liquefied gas are initially heavier than air and spread along ground. Runoff may create fire or explosion hazard. Containers may explode when heated. Ruptured cylinders may rocket.
NFPA Health 3
  Flammability 3  

Health.
Exposure limit(s) TLV: 10 ppm; 29 mg/m3 (as TWA) (ACGIH 1995-1996).
Exposure effects Seizures and CNS depression were reported in animals most likely secondary to anoxia from methemoglobinemia.
   Inhalation Cyanosis was reported in animal studies most likely due to methemoglobinemia.
   Skin Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite.
   Eyes Dogs exposed to 9600 ppm for 60 minutes developed slight eye irritation (Proctor et al, 1988).

First aid		  
   Ingestion Seek medical assistance.
   Inhalation Move patient to fresh air. Monitor for respiratory distress. If cough or difficulty breathing develops, evaluate for respiratory tract irritation, bronchitis, or pneumonitis. Administer oxygen and assist ventilation as required. Treat bronchospasm with beta2 agonist and corticosteroid aerosols.
   Skin Remove and isolate contaminated clothing and shoes. Immediately flush with running water for at least 20 minutes. In case of contact with liquefied gas, thaw frosted parts with lukewarm water.
   Eyes Irrigate exposed eyes with copious amounts of tepid water for at least 15 minutes. If irritation, pain, swelling, lacrimation, or photophobia persist, the patient should be seen in a health care facility.

Transport.
UN number 2451
Response guide 122
Hazard class 2.2
Std. Transport # 4920361 4904564